China begins mass production of homegrown immersion chipmaking machines in major breakthrough, report claims — first DUV lithography units will be delivered this year to SMIC, Hua Hong, and CXMT

A state-backed company in Shanghai has commenced mass production of China's first homegrown immersion DUV lithography machines. Approximately five units are expected for delivery this year to SMIC, Hua Hong, and CXMT, with twenty more projected by 2027. Reports indicate the operation utilized development teams from various firms, including Shanghai Yuliangsheng Technology. While most components are domestic, some critical parts originate from Japan. SMIC has been testing a Yuliangsheng immersion tool since September 2025.